LayTec develops, manufactures and markets optical in-situ and in-line metrology systems for thin-film processes. Our organization is expressly designed and committed to offering leading thin-film metrology solutions. We work closely with production line end-customers, equipment manufacturers and leading research institutions in order to achieve the most advanced thin-film process analysis and control.

The ability to control a deposition process in real-time offers major benefits: process deviations are quickly identified and corrected, development cycles are accelerated, the transfer and ramp-up of established processes to new lines is facilitated and conditions are easily re-established after maintenance. This all adds up to greater yields and reduced costs, which, in turn, makes the global industry more effective, more productive and more efficient in terms of energy and resource consumption. In addition, LayTec metrology tools are of crucial importance in the R&D labs of research organizations where new materials, processes and device structures are developed.

Our technology leadership in integrated metrology makes us a partner that major thin-film customers can rely on - no matter what specific thin-film equipment these customers decide to use.

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Products

• EddY

  The EddY system offers contact-free real-time monitoring of deposition processes of thin-films, e.g. transparent conductive oxides using high speed eddy current measurement. It provides comprehensive conductivity/sheet resistance analysis. The system characterizes all conductive thin films including zinc oxide (ZnO), indium tin oxide (ITO) and other TCOs.

  Other applications are thickness or sheet resistance measurements of metal layers or the analysis multi-layer carbon fiber fabrics regarding layup, orientation, missing bundles, or wrinkles.

  EddY can be integrated in almost any production line incl. vacuum chambers for 100% coverage of in-line analysis of conductivity properties. Up to 16 heads can be combined to enable tight lateral inspection even for large glass substrates.

  LayTec can easily adapt the system to customer’s needs for measurement ranges and dynamics. EddY offers quality control of low and high conductive thin-films, especially TCO sheet resistivity monitoring from 0.01 - 1000?/sq and thickness measurements from 5 nm.